Description
LAM 9600, TCP Metal Etch System
| Mounting | Bulkhead |
| Wafer Size | 200 MM |
| Software | Envision 1.52 |
| Indexers | HINE |
| AC Box | -001 |
| Gas Box | Orbital Welded |
| Clamping | ESC |
| Backside Helium | Closed Loop |
| Generator | 3 RFG 1250 |
| RF Match | Upper TCP, Lower Mini Match, DSQ Match |
| Turbo | SEKO SEKI 1000L |
| Turbo Controller | SEKI SEKI STP |
| VAT Gate | VAT 65 |
| VAT Controller | PM-7 |
| Endpoint | Dual Endpoint 703nm and 520nm |
| DSQ | Hinged |
| WVDS | Auto Fill |
| APM | Standard |
| MFCs | Unit 1660 |
Gas Config:
| Gas 1 | CL2 200 |
| Gas 2 | BCL3 100 |
| Gas 3 | SF6 100 |
| Gas 4 | N2 50 |
| Gas 5 | N2 1000 |
| Gas 6 | Ar 1000 |
| Gas 7 | O2 1000 |
| Gas 8 | CF4 200 |
| Gas 9 | H20 500 |
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