Description
LAM 9600, TCP Metal Etch System
Mounting | Bulkhead |
Wafer Size | 200 MM |
Software | Envision 1.52 |
Indexers | HINE |
AC Box | -001 |
Gas Box | Orbital Welded |
Clamping | ESC |
Backside Helium | Closed Loop |
Generator | 3 RFG 1250 |
RF Match | Upper TCP, Lower Mini Match, DSQ Match |
Turbo | SEKO SEKI 1000L |
Turbo Controller | SEKI SEKI STP |
VAT Gate | VAT 65 |
VAT Controller | PM-7 |
Endpoint | Dual Endpoint 703nm and 520nm |
DSQ | Hinged |
WVDS | Auto Fill |
APM | Standard |
MFCs | Unit 1660 |
Gas Config:
Gas 1 | CL2 200 |
Gas 2 | BCL3 100 |
Gas 3 | SF6 100 |
Gas 4 | N2 50 |
Gas 5 | N2 1000 |
Gas 6 | Ar 1000 |
Gas 7 | O2 1000 |
Gas 8 | CF4 200 |
Gas 9 | H20 500 |
Reviews
There are no reviews yet.