Spare Parts & Upgrades

Spare Parts & Upgrades

An Inventory of Low-Cost Items!

JTM Technologies maintains an inventory of spare parts that are made available to our customers at significant cost reduction. We supply over 350 items for use with LAM, TEL, Novelus, and AMAT systems. The parts include – but are not limited to – ceramics, electrodes, o-rings, quartz, and ESC’s.

JTM Technologies has developed innovative upgrades and compatible replacements for OEM parts, including heated paddles, electrodes, and computer and monitor upgrades.

Additionally, JTM Technologies has developed innovative yield-improving enhancements such as the Thermal Gas Purge System, better known as the TGPS.

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