LAM 4520 Oxide Etch System

LAM 4520 Oxide Etch System

Check for Exchange Availability

Price: Get a Quote

  • Refurbished with installation and warranty
  • System can be reconfigured to match Customer specifications.
  • Can convert to 6 or 8 system


LAM Research 4520 TCP Oxide Etch System

Mounting Bulkhead
Wafer Size 200 MM
Software Envision 1.52
Indexers HINE
AC Box -002
Gas Box Orbital Welded
Clamping ESC
Backside Helium Closed Loop
Generator PDW 2200
Endpoint Monochrometer
MFCs Unit 1660

Gas Config:

Gas 1 Ar 1000
Gas 2 N2 200
Gas 3 O2 200
Gas 4 CH4 200
Gas 5 CHF3 50
Gas 6 SF6 50
Gas 7 O2 1000


There are no reviews yet.

Be the first to review “LAM 4520 Oxide Etch System”

Your email address will not be published. Required fields are marked *

Request Quote