LAM 4520 Oxide Etch System

LAM 4520 Oxide Etch System

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  • Refurbished with installation and warranty
  • System can be reconfigured to match Customer specifications.
  • Can convert to 6 or 8 system
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Description

LAM Research 4520 TCP Oxide Etch System

Mounting Bulkhead
Wafer Size 200 MM
Software Envision 1.52
Indexers HINE
AC Box -002
Gas Box Orbital Welded
Clamping ESC
Backside Helium Closed Loop
Generator PDW 2200
RF Match LOFAT
Endpoint Monochrometer
MFCs Unit 1660

Gas Config:

Gas 1 Ar 1000
Gas 2 N2 200
Gas 3 O2 200
Gas 4 CH4 200
Gas 5 CHF3 50
Gas 6 SF6 50
Gas 7 O2 1000

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