LAM 4420 LAM 4420 Oxide Etch System

LAM 4420 LAM 4420 Oxide Etch System

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  • Refurbished with installation and warranty
  • System can be reconfigured to match Customer specifications.
  • Can convert to 6 or 8 system
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Description

LAM 4420 LAM 4420 Oxide Etch System

Mounting Bulkhead
Wafer Size 200 MM
Software Envision 1.52
Indexers HINE
AC Box -002
Gas Box Orbital Welded
Clamping Non-Clamp
Backside Helium N/A
Generator OEM 650
RF Match Mini Match
Endpoint Endpoint Detector
MFCs Unit 1660

Gas Config:

Gas 1 HBR 200
Gas 2 CL2 200
Gas 3 SF6 500
Gas 4 C2F6 500
Gas 5 HE 500
Gas 6 O2 100

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