Description
LAM 4420 LAM 4420 Oxide Etch System
Mounting | Bulkhead |
Wafer Size | 200 MM |
Software | Envision 1.52 |
Indexers | HINE |
AC Box | -002 |
Gas Box | Orbital Welded |
Clamping | Non-Clamp |
Backside Helium | N/A |
Generator | OEM 650 |
RF Match | Mini Match |
Endpoint | Endpoint Detector |
MFCs | Unit 1660 |
Gas Config:
Gas 1 | HBR 200 |
Gas 2 | CL2 200 |
Gas 3 | SF6 500 |
Gas 4 | C2F6 500 |
Gas 5 | HE 500 |
Gas 6 | O2 100 |
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