Description
LAM 4420 LAM 4420 Oxide Etch System
| Mounting | Bulkhead |
| Wafer Size | 200 MM |
| Software | Envision 1.52 |
| Indexers | HINE |
| AC Box | -002 |
| Gas Box | Orbital Welded |
| Clamping | Non-Clamp |
| Backside Helium | N/A |
| Generator | OEM 650 |
| RF Match | Mini Match |
| Endpoint | Endpoint Detector |
| MFCs | Unit 1660 |
Gas Config:
| Gas 1 | HBR 200 |
| Gas 2 | CL2 200 |
| Gas 3 | SF6 500 |
| Gas 4 | C2F6 500 |
| Gas 5 | HE 500 |
| Gas 6 | O2 100 |
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