Mechanical/Transport Assemblies

LAM Rainbow Indexer

  • 853-012600-001
  • 853-012600-002
  • 853-012600-101
  • 853-012600-102

Auto Etch / Gasonics Indexer

  • A94-016-03
  • A94-016-04
  • 853-004073-001

LAM Gates

  • 853-012200-002
  • 853-012200-004
  • 853-012661-001
  • 853-140013-001
  • 853-012350-001
  • 853-140013-001
  • 853-012875-002

LAM Harmonic Arm Drive

  • 853-012123-001
  • 853-012123-004
  • 853-012175-001
  • 853-012175-002
  • 853-012175-003
  • 853-012175-004
  • 853-012200-002
  • 853-012200-004
  • 853-012261-004

LAM Lifter Spinner

  • 853-012525-001
  • 853-012525-002

LAM Shuttle Assembly

  • 853-012550-001

LAM Edge Detector

  • 853-012500-001
  • 853-012500-002
  • 853-012500-003

DSQ Heated Paddle Substitute

  • 853-347146-006
  • 853-347146-008

Applied Susceptor / Wafer Lifter

  • 0010-09340
  • 0010-09341

LAM Paddle Lifter

  • 853-021924-001
  • 853-032776-001

Reduced Height & Standard Arm Housing

  • 853-021924-001
  • 853-032776-001

JTM Technologies