Spare Parts

An Inventory of Low-Cost Items!


JTM Technoloigies maintains an inventory of spare parts that are made available to our customers at significant cost reduction. We supply over 350 items for use with LAM, TEL, Novelus, and AMAT systems. The parts include - but are not limited to - ceramics, electrodes, o-rings, quartz, and ESC's.

JTM Technologies has developed innovative upgrades and compatible replacements for OEM parts. Including heated paddles, electrodes and computer and monitor upgrades.

Additionally, JTM Technologies has developed innovative yield improving enhancements such as the Thermal Gas Purge System, better known as the TGPS.

Electrodes

Silicon Electrode

Silicon (Si)


  • Core Exchange Option
  • 6 & 8
  • Quantity Pricing Available
Annodized Aluminum Electrode

Annodized Aluminum


  • Serialized for batch control
  • 6 & 8
  • Quantity Pricing Available

Other Items

DSQ Heated Paddles

DSQ Heated Paddles


  • Upgraded heater for uniform temperature control
  • Drop-in replacement for OEM
Computers

Computers


  • Greater ROI than OEM
  • Several Different Configurations Available
  • Computer/Monitor Upgrade Available
  • NeXT Compatible
  • Lam Standalone & Alliance Platform Compatible
  • Upgraded Processor, Hard Drive, and Power Supply
  • Can be shipped with a flat screen or light pen
  • Plug and Play option
Screen

Flat Panel Computer Screen


  • Replaces any Envision Monitor
  • Ability to Change out any portion or all pieces
  • Less Down time for repairs
  • Reliability
  • Lower cost of ownership
compupgrade

Computer / Monitor Upgrade


  • Replaces any Envision Monitor
  • Ability to Change out any portion or all pieces
  • Less Down time for repairs
  • Reliability
  • Lower cost of ownership
  • Greater ROI than OEM
  • Several Different Configurations Available
  • Computer/Monitor Upgrade Available
  • NeXT Compatible
  • Lam Standalone & Alliance Platform Compatible
  • Upgraded Processor, Hard Drive, and Power Supply
  • Can be shipped with a flat screen or light pen
  • Plug and Play option
TGPS

TGPS


  • Reduce Particle Problems
  • Reduce Polymer Flaking
  • Increase MTBC
  • Improve Yield
  • Resolve Defect Insursion
JTM Technologies