LAM 9600

LAM Research 9600 TCP Metal Etch System

Mounting:
Wafer Size:
Software:
Indexers:
AC Box:
Gas Box:
Clamping:
Backside Helium:
Generator:
RF Match:
Turbo:
Turbo Controller:
VAT Gate:
VAT Controller:
Endpoint:
DSQ:
WVDS:
APM:
MFCs:
Gas Config:
Bulkhead
200 MM
Envision 1.52
HINE
-001
Orbital Welded
ESC
Closed Loop
3 RFG 1250
Upper TCP, Lower Mini Match, DSQ Match
SEKO SEKI 1000L
SEKI SEKI STP
VAT 65
PM-7
Dual Endpoint 703nm and 520nm
Hinged
Auto Fill
Standard
Unit 1660

Gas 1:
Gas 2:
Gas 3:
Gas 4:
Gas 5:
Gas 6:
Gas 7:
Gas 8:
Gas 9:
CL2 200
BCL3 100
SF6 100
N2 50
N2 1000
Ar 1000
O2 1000
CF4 200
H20 500
JTM Technologies