LAM 4520

LAM Research 4520 TCP Oxide Etch System

Mounting:
Wafer Size:
Software:
Indexers:
AC Box:
Gas Box:
Clamping:
Backside Helium:
Generator:
RF Match:
Endpoint:
MFCs:
Gas Config:
Bulkhead
200 MM
Envision 1.52
HINE
-002
Orbital Welded
ESC
Closed Loop
PDW 2200
LOFAT
Monochrometer
Unit 1660

Gas 1:
Gas 2:
Gas 3:
Gas 4:
Gas 5:
Gas 6:
Gas 7:
Gas 8:
Ar 1000
N2 200
O2 200
CH4 200
CHF3 50
SF6 50
O2 1000
JTM Technologies