LAM 4420

LAM Research 4420 TCP Oxide Etch System

Mounting:
Wafer Size:
Software:
Indexers:
AC Box:
Gas Box:
Clamping:
Backside Helium:
Generator:
RF Match:
Endpoint:
MFCs:
Gas Config:
Bulkhead
200 MM
Envision 1.52
HINE
-002
Orbital Welded
Non-Clamp
N/A
OEM 650
Mini Match
Endpoint Detector
Unit 1660

Gas 1:
Gas 2:
Gas 3:
Gas 4:
Gas 5:
Gas 6:
Gas 7:
Gas 8:
HBR 200
CL2 200
SF6 500
C2F6 500
HE 500
O2 100
JTM Technologies